本文介紹了一種能顯著提高測(cè)量速度的光尋址電位傳感器(LAPS) 。用多個(gè)光源同時(shí)激發(fā)
LAPS ,每個(gè)光源都采用不同的調(diào)制頻率,對(duì)產(chǎn)生的光電流進(jìn)行分析就可以得到所有激發(fā)區(qū)域的表面電位分布圖。本文提出的方法得到被測(cè)氣體完整的電位響應(yīng)分布圖象,其速度比現(xiàn)有方法有很大提高。本文證明了該方法的可行性并給出了相應(yīng)的實(shí)驗(yàn)結(jié)果。
關(guān)鍵詞: 光尋址電位傳感器; 并行檢測(cè)技術(shù); 化學(xué)圖像傳感器; 數(shù)字補(bǔ)償
Abstract : A method which can significantly increase the measurement rate of the light2addressable potentiometric sensor (LAPS) is suggested. By illuminating the LAPS simultaneously at several positions , of which each is illuminat2 ed with a light pointer modulated with a different frequency , the surface potential at all illuminated regions can be
measured simultaneously by analyzing the resulting photocurrent. Using this method , the rate to obtain a complete im2 age of the surface potential distribution across a LAPS wafer can be drastically increased compared to the conventional mode , in which images are obtained by scanning the surface with one single light pointer. The technical feasibility of such a device is discussed and test measurements are presented.
Key words : Light addressable potentiometric sensor ; Parallel detection ; Chemical image sensors ; Digital com2 pensation