介紹了一種12 GHz附近的高溫超導(dǎo)薄膜微波表面電阻Rs測(cè)試系統(tǒng)。該系統(tǒng)采用低損耗高介電常數(shù)的藍(lán)寶石，構(gòu)成工作在TE011+δ諧振模式的介質(zhì)諧振器，在77 K時(shí)，利用測(cè)量介質(zhì)諧振器的Q值得到單片高溫超導(dǎo)薄膜的微波表面電阻Rs。分析了其耦合裝置對(duì)校準(zhǔn)物理模型的影響，通過改進(jìn)耦合裝置可提高系統(tǒng)測(cè)試的準(zhǔn)確度。該系統(tǒng)與前三代測(cè)試系統(tǒng)進(jìn)行比較，其測(cè)試準(zhǔn)確度有明顯地提高。A kind of High Tc superconductive thin film microwave surface resistance test system around 12 GHz is described in this paper. The surface resistance of a single piece of high Tc superconductive thin film can be measured by a sapphire resonator with TE011+δ mode non-destructivity, at 77 K. By measuring the value of the resonator’s quality factor, the surface resistance of testing sample can be also determined. And the influence of coupling device on calibrating physical model is also analyzed in this paper. Then testing accuracy of the system can be raised by improving coupling device. The test system is compared with former generations, and the testing accuracy is raised obviously.